Compact Coater "SVC-700TMSG/Adexcel"

You can attach three types of targets simultaneously! It is possible to create a multilayer film.

The multi-compact coater "SVC-700TMSG/Adexcel" is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the surface of the sample. Since three types of targets can be mounted simultaneously, it is possible to select targets in a vacuum and produce multilayer films. 【Features】 - Structure allows for optional installation of film thickness sensors, sample heating units, etc. - Can also be used as a resistance heating vacuum deposition device → Replace the exhaust unit with a resistance heating unit and connect a dedicated power supply. For more details, please contact us.

basic information

【Basic Specifications (Excerpt)】 ○Discharge Type: DC Magnetron ○Discharge Control: Constant Current 30mA ○Pressure Control: Manual control via needle valve ○Process Time: Up to 15min/timer control ○Process Gas: Ar (Introduction Pressure below 0.1MPa) ○Process Gas Inlet: φ6mm quick connector (for Sinflex tube) ○Target Size: φ49mm, t0.5mm (maximum) ○Number of Target Mounts: 3 types ○Applicable Targets: →Au, Pt, Au-Pd, Pt-Pd, Ag, Pd, W, Ni, Mo, Cr, Ti, Al, Cu, Fe ○Sample Size: Maximum φ50mm ○Sample Selection: Stage rotation type ○Target/Sample Distance (TS): 20mm, 30mm, 40mm ○Target Selection: Shutter method ○Power Supply Method: Standalone power supply switchable (power panel operation) ○Exhaust System: Turbo Molecular Pump (TMP) 67L/s (N2), Oil Rotary Pump (RP) 20L/min ○Achievable Vacuum Level: Below 1×10⁻³Pa ○Vacuum Measurement: Combination type vacuum gauge (Ionization vacuum gauge + Pirani vacuum gauge) ●For more details, please contact us.