Compact Coater SVC-700TMSG/Adexcel
Small film-forming device! It can simultaneously accommodate three types of targets.
The Multi-Target Compact Coater SVC-700TMSG/Adexcel is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the sample surface. Since three types of targets can be mounted simultaneously, it allows for target selection in a vacuum, enabling the production of multilayer films. 【Features】 ○ Three types of targets can be mounted simultaneously ○ Targets can be selected in a vacuum, allowing for the production of multilayer films ○ Optional attachments include a film thickness sensor and a sample heating unit ○ The exhaust device's upper part can be replaced with a resistance heating unit, and a dedicated power supply can be connected → Can also be used as a resistance heating vacuum evaporation device For more details, please contact us or download the catalog.
basic information
【Specifications】 ○Discharge Type: DC Magnetron ○Discharge Control: Constant Current 30mA ○Pressure Control: Manual control using a needle valve ○Process Time: Maximum 15min/Timer Control ○Process Gas: Ar (Introduction Pressure below 0.1MPa) ○Process Gas Inlet: Φ6mm Quick Coupling (for Sinflex Tube) ○Target Size: Φ49mm, t0.5mm (maximum) ○Number of Target Mounts: 3 types ○Applicable Targets: →Au, Pt, Au-Pd, Pt-Pd, Ag, Pd, W, Ni, Mo, Cr, Ti, Al, Cu, Fe ○Sample Size: Maximum Φ50mm ○Sample Selection: Stage Rotating Type ○Distance between Target and Sample (TS): 20mm, 30mm, 40mm ○Target Selection: Shutter Method ○Power Supply Method: Independent Power Supply Switching Type (Power Panel Operation) ○Exhaust System: Turbo Molecular Pump (TMP) 67L/s (N2), Oil Rotary Pump (RP) 20L/min ○Achievable Vacuum: Below 1×10⁻³Pa ○Vacuum Measurement: Combination Type Vacuum Gauge (Ion Vacuum Gauge + Pirani Vacuum Gauge) ●For more details, please contact us or download the catalog.
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