Optimal for FOUP gas purge control in semiconductor manufacturing! Sensirion's high-precision mass flow controller "SFC6000D".

センシリオン

Sensirion's "SFC6000D" is a mass flow controller optimized for FOUP (Front Opening Unified Pod) applications. In semiconductor manufacturing, a three-dimensional structure with an extremely high aspect ratio is required, and precise gas purge control is essential. The SFC6000D achieves accurate and stable gas flow control, contributing to yield improvement and cost reduction. ■ Key Features - High precision and fast response: Accurately controls the flow of protective inert gas - Excellent reproducibility and long-term stability - No microcontroller required: Calibrated digital sensors directly control the valve - Communication interfaces: Supports RS485, Modbus RTU, I2C, and analog voltage - Pressure-resistant design up to 10 bar: Compatible with 5/20/50 slm models - Humidity resistance: Stable operation even in non-condensing humidity environments ■ Target Audience - Semiconductor manufacturing equipment manufacturers - Wafer transport equipment manufacturers - Cleanroom-related equipment manufacturers For more details, please contact us or use the document download option.

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Mass Flow Controller 'SFC6000D-50slm'
Samples available in a short lead time of 8 weeks! The supply chain is robust.

【Mass Flow】 ■ Full scale flow: 50 slm ■ Full scale flow: 50000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.
Mass Flow Controller 'SFC6000D-20slm'
Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

【Mass Flow】 ■ Full scale flow: 5 slm ■ Full scale flow: 5000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, O2, N2O, Ar and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.
Mass Flow Controller 'SFC6000D-5slm'
The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

【Mass Flow】 ■ Full-scale flow rate: 5 slm ■ Full-scale flow rate: 5000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, O2, N2O, Ar and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.