Gas flow sensor 'SFM6000D-5slm'
Suitable for applications in semiconductors, analytical instruments, medical devices, and industrial automation!
The "SFM6000D-5slm" is a valve-less sibling product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. Unlike most other devices available on the market, this one does not drift and does not require service recalibration. 【Specifications (partial)】 ■ Full-scale flow rate: 5slm ■ Full-scale flow rate: 5000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.
basic information
【Other Specifications】 ■ Supply Voltage: 22.8 - 25.2V ■ Average Supply Current: 10mA ■ Maximum Supply Current: 20mA ■ Interface: I2C, RS485 ■ Size (LxWxH): 74 x 40 x 20mm *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Semiconductors: Front Opening Unified Pod (FOUP), glass coating and processing ■Analytical instruments: Gas chromatography, bioreactor ■Medical devices: Anesthesia, ventilation, cardiopulmonary bypass, N2O therapy ■Industrial automation *For more details, please download the PDF or feel free to contact us.
