Gas Flow Sensor "SFM5400"
Supports various joints and interfaces! Measurement is possible from 50 sccm to 200 slm.
The "SFM5400" is a mass flow meter that features high precision (error < 1%), long-term stability, and high repeatability, as well as a wide dynamic range. It is made of a metallic body and supports various fittings and interfaces, capable of measuring from 50 sccm to 200 slm. Additionally, it utilizes CMOSens technology, which integrates the sensor element and signal processing circuit onto a single CMOS chip. Combined with high-quality materials, this results in a stable durability and a fast, high-precision mass flow meter. 【Specifications (partial)】 ■ Full-scale flow rate: 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50, and 100 slm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.
basic information
【Other Specifications】 ■ Supply Voltage: 14 - 26.4V ■ Average Supply Current: 50000uA ■ Maximum Supply Current: 320000uA ■ Interface: Analog voltage, Analog current, Device net, IO link, RS485 ■ Size (LxWxH): 101.1 x 24.4 x 91mm *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
