センシリオン Official site

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

Related Link - https://sensirion.com/jp/products/product-catalog/…

basic information

【Other Specifications】 ■ Supply Voltage: 14 - 26.4V ■ Average Supply Current: 50000uA ■ Maximum Supply Current: 320000uA ■ Interface: RS485 ■ Size (LxWxH): 48 x 25 x 79.5mm *For more details, please download the PDF or feel free to contact us.

Price range

Delivery Time

Applications/Examples of results

For more details, please download the PDF or feel free to contact us.

Distributors

Recommended products