Mass Flow Controller "SFC5330"
Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.
The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.
basic information
【Other Specifications】 ■ Supply Voltage: 14 - 26.4V ■ Average Supply Current: 50000uA ■ Maximum Supply Current: 320000uA ■ Interface: RS485 ■ Size (LxWxH): 34 x 25 x 62.2mm *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
