Mass Flow Controller 'SFC5500-0.5slm'
A culmination of our 20 years of achievements in the precise control of gas flow!
The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.
basic information
【Other Specifications】 ■ Supply Voltage: 14 - 26.4V ■ Average Supply Current: 75000uA ■ Maximum Supply Current: 120000uA ■ Interface: Device net, RS485 ■ Size (LxWxH): 115 x 24.6 x 91mm *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
