Ultrasonic Micro Liquid Flow Meter μLF Series
Demo unit available for loan! Non-contact flow meter for semiconductor chemical solutions from a specialized ultrasonic manufacturer. No expensive liquids will be wasted at all.
This is a clamp-on ultrasonic liquid flow meter developed using measurement technology cultivated over many years with ultrasonic gas flow meters. It emits ultrasonic waves from the outer wall of the piping into the pipe interior, utilizing the change in ultrasonic propagation time between sensors due to the liquid's velocity to convert it into flow rate. The sensors are non-contact with the liquid. 【Features】 - Capable of measuring very small flow rates - High response achieved with 300 measurements per second - Sensor part adopts a non-contact structure with the fluid (straight tube) - Wide rangeability - Excellent responsiveness *For more details, please download the PDF or feel free to contact us. *If you would like to borrow a free demo unit, please inquire through the contact form.
basic information
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Applications/Examples of results
Flow rate management in micro-regions of semiconductor manufacturing processes such as IPA, pure water, and chemical solutions for cost management and quality control.
Line up（1）
| Model number | overview |
|---|---|
| μLF-300S | Detection separation type |
