193nm high-reflective laser mirror for ArF excimer laser
Achieved a reflectance of ">98% at 193nm" with IBS coating! Protects the optical system from UV lasers and extends its lifespan.
We offer the "193nm High Reflective Laser Mirror" for ArF excimer lasers developed by Optoman. Achieving a reflectivity of ">98% @193nm" with IBS coating. To realize high reflectivity in the ultraviolet wavelength range, it is essential to effectively control scattering and absorption losses. For UV laser users, mirror degradation is a significant issue. The manufacturer has focused on surface quality and optimized coating technology. This technology protects the optical system from UV lasers and extends its lifespan. 【Product Specifications】 ■ Material: UVFS (Corning 7980 0F) ■ Diameter: 25.4mm +0/-0.1mm ■ Thickness: 6.35mm +/-0.1mm ■ Effective Diameter: 22mm ■ Surface Accuracy S1: <λ/10@633nm over any 15mm diameter *For more details, please download the PDF (English version) or feel free to contact us.
basic information
【IBS Coating】 ■S1: HRa > 98% @ 193nm, AOI = 45deg ■S2: Uncoated *For more details, please download the PDF (English version) or feel free to contact us.
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For more details, please download the PDF (English version) or feel free to contact us.
