Ultra-high purity air-driven diaphragm pump for semiconductors

Assembly conducted in a Class 100 clean room! Specially designed diaphragm pump for semiconductors.

The ultra-high purity diaphragm pump "SEMI series" for semiconductors is specially designed and manufactured for semiconductor production. The assembly of the products is carried out in a Class 100 clean room, where all parts are washed with pure water, tested with pure water, and finally sealed in plastic foil for shipment. We offer four types: "SEMI T" and "SEMI H," made with PTFE/TFM for all wetted parts; "SEMI E," with wetted parts made of UPPE (ultra-pure polyethylene); and "SEMI S," made of SUS316L. 【Features】 - No metal is used at all - No O-rings are used in wetted parts - No lubricating oil is used in the drive air section - Maximum operating temperature of 200℃ - Four types of pumps made from different materials to accommodate different applications - Options include pulsation dampers, diaphragm rupture detection, stroke counters, Flareteck fittings, and VCR fittings - Maintenance and repairs are extremely easy → Compared to other competing products, the number of spare parts is reduced by 40%, making it economical For more details, please contact us or download the catalog.

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basic information

【Model Overview】 [Model: SEMI T] ○Material →Center Housing: TFM/PTFE →Side Housing: UPPE ○Diameter: 10, 20, 50, 100 ○Fluid: Acid and caustic [Model: SEMI H] ○Material →Center Housing: TFM/PTFE →Side Housing: PTFE ○Diameter: 10, 20 ○Fluid: High-temperature acid and caustic [Model: SEMI E] ○Material →Center Housing: UPPE →Side Housing: UPPE ○Diameter: 10, 20, 50, 100 ○Fluid: Slurry [Model: SEMI S] ○Material →Center Housing: SUS316L →Side Housing: SUS316L ○Diameter: 20, 50 ○Fluid: Solvent ●For more details, please contact us or download the catalog.