Ultra-high purity air-driven diaphragm pump for semiconductors
Assembly conducted in a Class 100 clean room! Specially designed diaphragm pump for semiconductors.
The ultra-high purity diaphragm pump "SEMI series" for semiconductors is specially designed and manufactured for semiconductor production. The assembly of the products is carried out in a Class 100 clean room, where all parts are washed with pure water, tested with pure water, and finally sealed in plastic foil for shipment. We offer four types: "SEMI T" and "SEMI H," made with PTFE/TFM for all wetted parts; "SEMI E," with wetted parts made of UPPE (ultra-pure polyethylene); and "SEMI S," made of SUS316L. 【Features】 - No metal is used at all - No O-rings are used in wetted parts - No lubricating oil is used in the drive air section - Maximum operating temperature of 200℃ - Four types of pumps made from different materials to accommodate different applications - Options include pulsation dampers, diaphragm rupture detection, stroke counters, Flareteck fittings, and VCR fittings - Maintenance and repairs are extremely easy → Compared to other competing products, the number of spare parts is reduced by 40%, making it economical For more details, please contact us or download the catalog.
basic information
【Model Overview】 [Model: SEMI T] ○Material →Center Housing: TFM/PTFE →Side Housing: UPPE ○Diameter: 10, 20, 50, 100 ○Fluid: Acid and caustic [Model: SEMI H] ○Material →Center Housing: TFM/PTFE →Side Housing: PTFE ○Diameter: 10, 20 ○Fluid: High-temperature acid and caustic [Model: SEMI E] ○Material →Center Housing: UPPE →Side Housing: UPPE ○Diameter: 10, 20, 50, 100 ○Fluid: Slurry [Model: SEMI S] ○Material →Center Housing: SUS316L →Side Housing: SUS316L ○Diameter: 20, 50 ○Fluid: Solvent ●For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
Model number/Brand name
DELLMECO
Applications/Examples of results
- Acid, caustic - High-temperature acid, caustic - Slurry - Solvent ● For more details, please contact us or download the catalog.
catalog（2）
Download All Catalogs
Recommended products
Distributors
Sunny Trading has consistently specialized in the import and sales of automatic control and labor-saving equipment since its establishment in 1961, actively introducing the latest high-performance machinery and equipment from Europe and the United States to the domestic market. The components for production machinery that we handle are widely adopted in industries such as machinery, electrical, and chemical, and we take pride in our extensive delivery track record to national government agencies, universities, research institutions, and the aerospace industry. The delivered parts are incorporated into machines to complete large production facilities, but confirming the compatibility of the products is essential for this process. We always strive to provide appropriate products by investing technical know-how and time for specification confirmation between overseas manufacturers and our customers. Additionally, we take responsibility for follow-up services, including on-site inspections of delivered products and maintenance. Unlike general trading companies that simply import and sell goods, we pride ourselves on being a trading company with engineering capabilities. Products are commercialized as machines by manufacturers, and they are actively utilized in core industries such as semiconductors, steel, shipbuilding, aerospace, packaging, logistics, and chemicals.