For the semiconductor industry! A siloxane-free filler to mitigate damage!
Suppresses wafer contamination and contact failure caused by siloxane gas! Siloxane content of 5μm or less in fluororubber-based paste sealant "HVF-1"!
The silicone-free paste sealant "HVF-1" has a siloxane content of less than 5μm, which helps to suppress damage caused by siloxanes. By preventing "wafer contamination," "contact failures," "corrosion of metal parts," "the generation of foreign substances due to chemical reactions," and "contamination of exposure device lenses" caused by siloxanes, it can be used for sealing gaps inside clean rooms and for caulking inside semiconductor manufacturing equipment. 【Features】 ■ Resistant to both acids and alkalis ■ Air dries at room temperature ■ Main raw material is fluororubber that does not contain silicone, etc. * Free samples are available. * For more details, please download the PDF or contact us.
basic information
For more details, please download the PDF or contact us.
Price information
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Delivery Time
Model number/Brand name
HVF-1
Applications/Examples of results
【Applications】 - Sealing of joint surfaces such as piping flanges - Sealing of duct joints - Sealing and repair for chemical etching equipment and semiconductor cleaning equipment - Sealing in situations where siloxane is not suitable, such as in painting, optics, and precision machinery - Alternative sealing materials for sealing and repair purposes in equipment and devices requiring heat resistance and chemical resistance, where silicone materials cannot be used, etc.
