CKD Process Gas Valve "LGD Series"
New series of valves for process gas! Air-operated valves have been added!
We have achieved low costs through the optimization of production methods. It can be used in semiconductor manufacturing equipment and factory piping, and is applicable to process gases and inert gases.
basic information
[Features] ▼ Manual Valve for Process Gas ○ Manual valve suitable for inert gas and process gas ○ 180° rotation mechanism ○ Connections available in three types: equivalent to VCR male fitting, equivalent to VCR female fitting, and double bite fitting (diameters: 1/4”, 3/8”, 1/2”) ○ Flow path electropolished ○ Weight: LGD10 → 0.26 kg, LGD20 → 0.57 kg ▼ Air Operated Valve for Process Gas ○ Operated valve suitable for inert gas and process gas. ○ Connections available in three types: equivalent to VCR male fitting, equivalent to VCR female fitting, and double bite fitting (diameters: 1/4”, 3/8”, 1/2”) ○ Weight: LGD1* → 0.23 kg, LGD2* → 0.57 kg (Note: The weights are values when equivalent to VCR male fitting.)
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Detailed information
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Manual Valve for Process Gas [Features] ○ Manual valve suitable for inert gases and process gases ○ 180° rotation mechanism ○ Connections available in three types: equivalent to VCR male fitting, equivalent to VCR female fitting, and double bite fitting (diameters: 1/4”, 3/8”, 1/2”) ○ Flow path electropolished ○ Weight: LGD10 → 0.26 kg, LGD20 → 0.57 kg (The weight is the value when equivalent to the VCR male fitting.)
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Air Operated Valve for Process Gas [Features] ○ Operate valve suitable for inert gases and process gases. ○ Connections available in three types: equivalent to VCR male fittings, equivalent to VCR female fittings, and double bite fittings (diameters: 1/4”, 3/8”, 1/2”). ○ Weight: LGD1※→0.23 kg, LGD2※→0.57 kg (Weight values are for the equivalent of VCR male fittings.)
Line up（2）
| Model number | overview |
|---|---|
| LGD※0 | Manual valve for process gas |
| LGD※※ | Operated valve for process gas |
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Since our establishment in 1987, we have provided various FA equipment tailored to our customers' needs. Now, as a member of the THK group, the world's leading manufacturer of linear motion systems, we have 18 sales locations across Japan, responding quickly and accurately to our customers' requests.