Automate and enhance the efficiency of wafer transport and alignment! Make semiconductor manufacturing processes smarter.
Contributes to the efficiency and quality improvement of semiconductor manufacturing processes. Since there are no specialized parts, maintenance is easy, allowing for quick recovery. It achieves low costs.
We offer wafer-related products that enable efficient semiconductor manufacturing processes. ■ Wafer Transfer Rapidly transfer up to 25 wafers stored in a carrier to another carrier or boat. Equipped with an alignment function, it flexibly accommodates different wafer thicknesses (275–600μm). ■ Wafer ID Reader / Sorter Reads the lot numbers printed on wafers and accurately aligns wafers that are out of order. In addition to sorting in ascending and descending order, it supports over 30 processing patterns, including the removal of unnecessary wafers and splitting or merging. 【Features】 ■ No dedicated parts are used, allowing for quick recovery in case of failure. ■ User-friendly operation via a touch panel. ■ Achieves similar functionality at a lower initial cost compared to dedicated equipment. *For more details, please download the PDF or feel free to contact us.
basic information
【Other Features】 <Wafer Transfer> ■ Transfers 25 wafers to carriers or boats at once ■ Built-in alignment function ■ Capable of handling different wafer thicknesses (275–600um) ■ Achieves a high throughput of 25 seconds per cycle *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
