Vacuum pump unit (integrated device) P94
Water-sealed vacuum pump unit suitable for the suction of gases containing water droplets and water vapor!
The "Vacuum Pump Unit P94" is a unit used as a vacuum source to hold the workpiece while cutting it with a chemical solution. It is used as a vacuum generation device for the wafer vacuum chuck of a dicing machine and consists of a water-sealed pump, control valve, flow meter, vacuum pressure gauge, and other components. 【Features】 ■ A water-sealed vacuum pump unit for vacuum chucks in wet processing equipment ■ Suitable for suction of gases containing water droplets and water vapor *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.
basic information
【Specifications】 ○ Composed of a water-sealed pump, control valve, water flow meter, vacuum pressure gauge, etc. ○ Motor output: 1.45KW/1.85KW (50/60HZ) ○ Maximum pressure: 3.3kPa ○ Exhaust rate: 48m³/h, 59m³/h (50/60HZ) ○ Connection diameter: 25mm ○ Water supply: 3.83LP, 0.2?0.5MPa ○ Weight: Approximately 50Kg ○ External dimensions: D484×H218×W186 ○ Noise level: 65dB/69dB (50/60HZ) ○ Power supply voltage: 185?220V 3-phase Δ connection ○ Rated current: 6.4A/8.2A (50/60HZ) ○ Ambient temperature: 40℃
Price information
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Delivery Time
Model number/Brand name
P94
Applications/Examples of results
【Usage】 ■ Dicer (embedded in equipment) ■ Wet processing equipment 【Examples of Achievements】 Used as embedded equipment
Line up（1）
| Model number | overview |
|---|---|
| P94 |
