The introduction of fully automatic photo mask cleaning equipment is increasing among major manufacturers!
TECHNOVISION, INC. main office
"Speaking of mask cleaning, it's Techno Vision." With this motto, we will continue to aim for the best in the industry and the world. Production of LEDs is becoming active in Taiwan, China, and Japan, and as a result, we are receiving orders for photomask cleaning equipment from major manufacturers. At Techno Vision, in addition to the scrub cleaning techniques we have developed over the years, we have also been working on the development of new chemical cleaning technologies. ◆ Scrub cleaning: Mainly for particle removal ◆ Chemical cleaning: For removing resist adhered to the mask In LED production, the design rule L/S of the element pattern has not yet reached the submicron range, so proximity or contact aligners are used in the exposure process. Therefore, cleaning equipment with both resist removal and particle removal functions is necessary to address mask contamination. At a certain major LED manufacturer, mask cleaning has reached over 5,000 pieces per month, necessitating protective measures against harmful chemicals. Techno Vision's fully automatic mask cleaning equipment is the only compact, small footprint cleaning device that can meet the needs of such mass production factories, ensuring safety and being environmentally friendly. ◆ For more details, please contact us.
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