Proposal for semiconductor solutions
Introduction to dew point meters, oxygen concentration meters, temperature and humidity meters, and anemometers in semiconductor manufacturing and clean rooms.
In the semiconductor manufacturing process, the removal of moisture and oxygen is a significant challenge. Our dew point meters, temperature and humidity meters, and oxygen concentration meters are used in various processes such as semiconductor manufacturing, transportation, and inspection. They are also used for measuring the dehumidification in dry air and the gas purity of nitrogen, argon, helium, hydrogen, and other gases. In moisture measurement, we primarily use the TK-100 capacitive dew point meter (alumina type), which can measure down to a minimum dew point of -100°C, the TE-660 dew point meter (polymer type) for a minimum dew point of -60°C, and the MBW mirror-cooling dew point meter, which can measure from -95°C to +99°C and is used when high precision is required or as a reference instrument for dew point meters. In the humidity domain, the simple EE060 and the EE33 temperature and humidity meter, which is equipped with measures to prevent condensation in high temperature and high humidity environments, are mainly used. For oxygen concentration measurement, during oxygen removal by hydrogen substitution, the 2001LC galvanic cell oxygen concentration meter is used for PPM levels, while the Model 4100 zirconia oxygen concentration meter is used for PPB levels in situations where hydrogen is not present, making them applicable in various scenarios. Additionally, anemometers are also utilized for measuring micro-wind in clean rooms and manufacturing equipment.
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【Applications】 ● Dew point management in glove boxes ● Dew point check for dryers/dry air ● Dew point management in clean rooms and dry rooms ● Gas purity management ● Semiconductor manufacturing equipment ● Organic EL manufacturing and many others
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