iTMA Series for Display Manufacturing
Inline measurement of moisture in corrosive gases contributes to yield improvement!
In the display manufacturing industry, the cleanliness of gases in the manufacturing process is crucial as one of the factors that influence product quality. In particular, moisture in corrosive gases can lead to a decrease in product yield. The iTMA series supports the optimization of the manufacturing process by measuring moisture in corrosive gases inline, contributing to improved yield. 【Usage Scenarios】 - Moisture management of corrosive gases in the display manufacturing process - Quality control of products and yield improvement - Monitoring of gas supply systems 【Benefits of Implementation】 - Reduction of product defects - Decrease in manufacturing costs - Stabilization of quality
basic information
【Features】 - Measures in the range of 0-2500 ppm with a maximum accuracy of ±1% - Achieves a price about 1/4 that of laser-type devices - Available in desktop, 19" rack mount, and portable types - Uses corrosion-resistant sensors, with options for the material selection of the housing, electrodes, and O-rings - Easy maintenance (simply apply phosphoric acid regularly) 【Our Strengths】 As a domestic dew point meter manufacturer, we leverage our long-standing moisture measurement technology to provide products tailored to our customers' needs. In addition to selling measuring instruments, we also offer calibration, inspection, and repair services, providing total support from installation to operation.
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Model number/Brand name
iTMA Series
Applications/Examples of results
● Corrosive gas manufacturing process ● Management of corrosive gas purity in the semiconductor industry ● Chlorine drying equipment ● Moisture management in refrigerants ● Moisture management in medical oxygen gas ● Polyethylene manufacturing process ● Moisture management in heat treatment furnaces ● Moisture management in Ar and He during the welding process ● CO2 drying, dry ice manufacturing process
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.










