TKZM-RO Furnace Atmosphere Measurement and Control Panel for Semiconductors
Contributing to impurity control through gas measurement of the furnace atmosphere.
In the semiconductor manufacturing industry, strict management of the furnace atmosphere gas is essential to improve product quality and yield. In particular, impurities such as dew point, oxygen concentration, and hydrogen concentration can adversely affect the performance of semiconductor devices. Proper control of these impurities is crucial for the stable production of high-quality products. The furnace atmosphere measurement control panel TKZM-RO measures dew point, oxygen concentration, and hydrogen concentration all in one unit, supporting impurity control in the semiconductor manufacturing process. 【Usage Scenarios】 - Monitoring of furnace atmosphere in the semiconductor manufacturing process - Suppression of product defects caused by impurities - Optimization of the manufacturing process 【Benefits of Implementation】 - Stable supply of high-quality semiconductor products - Improvement in yield - Reduction in manufacturing costs
basic information
【Features】 - Measurement of dew point, oxygen concentration, and hydrogen concentration - Gas measurement of 1-3 sample lines - Customizable shapes and flow changes to meet customer needs with a wide range of options - High-temperature environments are possible with optional panel coolers - Measurement panel for furnace atmosphere 【Our Strengths】 As a domestic dew point meter manufacturer, we leverage the technology and know-how we have cultivated over many years to provide optimal products tailored to customer needs. We handle a variety of measuring instruments and devices, including the dew point meter TK-100 series, and respond quickly to complex issues. We also offer calibration, inspection, and repair services to support stable operation of our products.
Price information
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Delivery Time
Model number/Brand name
TKZM-RO
Applications/Examples of results
■ Furnace atmosphere, etc. (Chamber/Test chamber atmosphere) ■ Dew point, oxygen, hydrogen measurement
Distributors
We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.