EE610 Low Differential Pressure Sensor for Semiconductors
Contributing to the improvement of exhaust management accuracy!
In the semiconductor manufacturing process, maintaining a clean environment is essential, and proper management of the exhaust system is required. In particular, to prevent the leakage of harmful substances and fine particles, it is important to accurately monitor exhaust pressure and detect anomalies early. Pressure that is too low can lead to a decrease in exhaust capacity, while pressure that is too high can cause increased load on the system and lead to failures. The EE610 low differential pressure sensor maintains the optimal condition of the exhaust system through high-precision differential pressure measurement, ensuring the safety of the manufacturing environment. 【Application Scenarios】 - Exhaust systems in clean rooms - Exhaust management for semiconductor manufacturing equipment - Monitoring of hazardous gas emission facilities 【Benefits of Implementation】 - Early detection of anomalies in the exhaust system to prevent accidents - Improved safety of the manufacturing environment - Increased equipment operating rates
basic information
【Features】 - Analog and digital output - IP65 / NEMA 4X - Accuracy ± 0.5 Pa - Measurement range: ± 25 / ± 50 / ± 100 Pa, 0 to 100 Pa - Compatible with all non-flammable and non-corrosive gases, not just air 【Our Strengths】 As a domestic dew point meter manufacturer, we leverage our extensive experience and technical expertise to provide optimal products and services tailored to our customers' needs. We offer comprehensive support, not only in the sale of measuring instruments but also in calibration, inspection, and repair, ensuring stable operations for our customers.
Price information
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Delivery Time
Model number/Brand name
EE610
Applications/Examples of results
● Clean room ● Hospital ● Research institute ● Isolation room ● Pharmaceutical industry and many others
Distributors
We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.