Negative Pressure Auto Drain for Semiconductor Clean Rooms
Automating liquid discharge in cleanroom environments to improve system reliability.
In the semiconductor manufacturing industry's cleanroom environment, the contamination of fine particles and liquids significantly affects product quality. In particular, liquids and droplets that accumulate in gas sampling lines and related equipment can cause system malfunctions and contamination, potentially leading to reduced yield. The negative pressure auto-drain has been designed to address these issues. By continuously and automatically discharging accumulated liquids, it helps maintain the cleanliness of the cleanroom environment and supports a stable manufacturing process. 【Usage Scenarios】 - Gas sampling lines in cleanrooms - Wastewater treatment from semiconductor manufacturing equipment - Drainage from pre-filters, spray scrubbers, and liquid traps 【Benefits of Implementation】 - Reduced contamination risk in cleanroom environments - Improved system reliability and reduced maintenance frequency - Stabilization of product quality and increased yield
basic information
**Features** - Continuously discharges accumulated liquids and droplets - Prevents backflow from ambient air to sample gas, enhancing system reliability - Liquid level can be checked via a level confirmation tube, making maintenance easy - Overflow port prevents overfilling and is easy to use - Can connect drainage from up to two devices **Our Strengths** Leveraging the technology and know-how cultivated as a domestic dew point meter manufacturer, we provide optimal products tailored to customer needs. With extensive knowledge in moisture management and custom solutions through piping, line creation, and unitization, we respond quickly to complex issues.
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Applications/Examples of results
Continuous removal of moisture and liquids from gases containing solvents, etc.
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.