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Backflow Prefilter for Semiconductor Manufacturing

Effectively remove powders and fine particles to maintain cleanliness.

In the semiconductor manufacturing industry, maintaining the cleanliness of the manufacturing process is essential for improving product quality and yield. Microparticles and powders can degrade device performance and lead to defects. The Neutronics blowback pre-filter efficiently removes powders and particulate matter from the sample gas, preventing contamination and damage to oxygen sensors and sampling equipment. The automatic cleaning function reduces maintenance frequency and enhances system reliability. 【Usage Scenarios】 - Gas supply lines in semiconductor manufacturing processes - Sampling points in clean rooms - Gas supply to analytical instruments 【Benefits of Implementation】 - Improved product quality through high-purity gas supply - Reduced maintenance costs - Stable operation of the system

Techne Measurement Site (Explosion Limit Detection Model Oxytron2000/Mini-ICS)

basic information

【Features】 - Efficiently removes powder and particulate matter from sample gas - Effectively removes particulate matter down to 0.4 microns - Sintered metal filter element: capable of continuous operation and long lifespan - Automatic filter cleaning available - Corrosion-resistant structure: options available for SUS housing/SUS element or kyner housing/Hastelloy element 【Our Strengths】 Leveraging the technology and experience cultivated as a domestic dew point meter manufacturer, we provide optimal products tailored to customer needs. We offer total solutions through combinations with various measuring instruments and devices, including dew point meters, and respond quickly to complex issues.

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Applications/Examples of results

Removal of particulate matter from gases containing powders and fine particles, etc.

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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.