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Acid scrubber for semiconductors

Effective removal of acidic substances in sampling gas.

In the semiconductor manufacturing industry, the cleanliness of gases in the manufacturing process is crucial for the stable production of high-quality products. In particular, acidic substances in sampling gases can cause corrosion of equipment and performance degradation, potentially adversely affecting product quality. Acid scrubbers are designed to address these issues. 【Usage Scenarios】 - Gas analysis in the semiconductor manufacturing process - Protection of sampling equipment - Protection of oxygen sensors 【Benefits of Implementation】 - Effective removal of acidic substances in sampling gases - Suppression of equipment corrosion and performance degradation - Contribution to improved product quality

Techne Measurement Site (Explosion Limit Detection Model Oxytron2000/Mini-ICS)

basic information

【Features】 - Effectively removes water-soluble components (such as hydrochloric acid, ammonia, etc.) from sample gas. - The flow direction of the sample gas is opposite to that of the scrubber liquid, improving performance. - Continuously sprays water or cleaning solution from the top to enhance the removal of contaminants. - The drain port at the bottom facilitates the discharge of cleaning solution, simplifying use and maintenance. - Made from corrosion-resistant materials: stainless steel, selected from Kyner. 【Our Strengths】 As a domestic dew point meter manufacturer, we leverage the technology and know-how we have cultivated over many years to provide optimal products tailored to our customers' needs. We offer total solutions not only with acid scrubbers but also in combination with related measuring instruments and devices, supporting our customers in solving their challenges.

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Applications/Examples of results

Continuous treatment of corrosive gases containing solvents and particulate matter.

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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.