Inert Gas Oxygen Concentration Control System for Semiconductor Manufacturing
Four solenoid valves can be remotely operated! Ideal for monitoring oxygen concentration and controlling inert gas flow.
In the semiconductor manufacturing industry, strict management of oxygen concentration in the manufacturing process is essential to improve product quality and yield. In particular, maintaining an inert gas environment is crucial to suppress oxidation and prevent performance degradation of products. Improper management of oxygen concentration can lead to product defects and performance decline. Our Inert Gas Oxygen Concentration Control System (ICS) effectively prevents oxidation in the semiconductor manufacturing process by monitoring oxygen concentration and controlling the flow rate of inert gas. 【Application Scenarios】 - Inert gas purging in semiconductor manufacturing processes - Improved safety through explosion limit management - Reduction of VOC emissions 【Benefits of Implementation】 - Improved product quality and yield - Enhanced safety of the manufacturing process - Reduced environmental impact through decreased VOC emissions
basic information
【Features】 - Proper management of N2 purge volume for various process equipment - Improved safety through explosion limit management - Domestic explosion-proof certification obtained - Double safety design with two sensors installed - Feedback control function for the flow rate of inert gas introduced into the process vessel 【Our Strengths】 Leveraging the technology cultivated as a domestic dew point meter manufacturer, we provide optimal solutions tailored to our customers' needs. We quickly address complex issues by combining various measuring instruments and devices, such as oxygen concentration meters, dew point meters, and moisture meters.
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Delivery Time
Model number/Brand name
Oxytron2000/Mini-ICS
Applications/Examples of results
Monitoring of oxygen concentration and control of inert gas injection flow rate for various equipment such as centrifuges, reaction vessels, mixing tanks, grinders, dryers, solvent recovery systems, and storage tanks located in hazardous areas, for the purposes of explosion prevention, oxygen deficiency prevention, reaction control, and quality maintenance, among others.
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.