Mass Flow Meter for Semiconductor Manufacturing EE771/EE772
Supporting cleanliness management in semiconductor manufacturing. Improving quality through high-precision measurement.
In the semiconductor manufacturing industry, the presence of minute foreign substances during the manufacturing process significantly affects product quality. In particular, the management of the cleanliness of compressed air and various gases is a crucial factor that influences yield. The mass flow meters EE771/EE772 accurately measure these gas flows and assist in cleanliness management. By providing high-precision measurements and reliable data, they contribute to the optimization of the manufacturing process. 【Usage Scenarios】 - Compressed air supply lines in clean rooms - Various gas supply lines (nitrogen, oxygen, argon, etc.) - Gas supply to semiconductor manufacturing equipment 【Benefits of Implementation】 - Strengthened quality control through accurate monitoring of gas flow - Cost reduction through optimization of gas usage - Stabilization of the manufacturing process and improvement of yield
basic information
【Features】 - High precision indication value of ±1.5% - Pre-set measurement under pressure before shipment - Excellent reproducibility - Quick sensor replacement under line pressure (EE772) - Bus interface for Modbus RTU/M-BUS 【Our Strengths】 Leveraging the technology and know-how cultivated as a domestic dew point meter manufacturer, we provide optimal product selection tailored to customer needs and meticulous support. In addition to selling measuring instruments, we also offer calibration, inspection, and repair services, ensuring that you can use our products with confidence even after installation.
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Delivery Time
Model number/Brand name
EE771/EE772
Applications/Examples of results
● Measurement of compressed air consumption ● Flow measurement of industrial gases (O2, N2, Ar, CO2, He) ● Nitrogen generator ● Leak detection and various others
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.