NFM Series Small High-Precision Area Flow Meters for Semiconductors
A compact, high-precision flow meter suitable for embedding in a panel, supporting chemical management.
In semiconductor manufacturing, accurate flow measurement in chemical management is essential to ensure product quality and safety. Inaccurate flow of chemicals can adversely affect wafer cleaning and etching processes, potentially leading to reduced yield and product defects. The compact, high-precision area flow meter NFM series addresses these challenges. 【Application Scenarios】 - Chemical supply lines - Flow management of cleaning solutions - Flow control of etching solutions 【Benefits of Implementation】 - Improved quality through accurate flow measurement - Enhanced safety through reduced leaks - Improved work efficiency due to ease of installation
basic information
**Features** - Low-cost, compact, high-precision area flow meter - Minimal leakage, capable of handling gases at the ppm level - Panel-mounted type with minimal protrusion, suitable for embedding in panels - Compact and simple structure with a width of about 120mm, easy to install - Compliant with RoHS directive **Our Strengths** Leveraging the technology cultivated as a domestic dew point meter manufacturer, we provide products tailored to customer needs. We handle not only flow meters but also various measuring instruments and devices related to moisture management, capable of addressing complex issues.
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Model number/Brand name
NFM
Applications/Examples of results
● Purge air/nitrogen ● Flow management to measuring instruments Among others, various aspects
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.