Dew Point Generator G3 for Semiconductor Clean Rooms
Precision control of humidity using a NIST-validated two-temperature, two-pressure system.
In the cleanroom environment of semiconductor manufacturing, humidity management is a crucial factor that influences product quality and yield. Even minor changes in moisture levels can lead to performance degradation of products or abnormalities in the manufacturing process. In particular, dew point management is essential to prevent particle generation due to condensation and to ensure product reliability. The G3 frost point generator achieves ultra-high precision dew point generation across a wide range of -120 °C FP to +10 °C DP, providing strong support for humidity management in cleanrooms. 【Usage Scenarios】 - Cleanrooms in semiconductor manufacturing plants - Research and development facilities - Quality control departments 【Benefits of Implementation】 - Improved product quality through high-precision humidity management - Enhanced manufacturing yield - Realization of stable manufacturing processes
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【Features】 - Ultra-low dew point -120 °C FP to +10 °C DP - Ultra-high precision dew point generation using hybrid two-temperature two-pressure method - Dual, refrigerant-free cryocooler (ultra-low temperature cooler) - 1 to 3 independent flow-controlled gas output lines - Vacuum insulated/insulated saturation vessel and control valve 【Our Strengths】 As a domestic dew point meter manufacturer, we support our customers in solving their challenges with our long-established moisture measurement technology and flexible solutions tailored to their needs. Starting with the TK-100 series dew point meter, we quickly address complex issues by combining various measuring instruments and devices.
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G3
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.