Introducing a robotic automatic polishing device for semiconductor manufacturing equipment parts!

"REX03" is a "high-precision contour polishing system" that measures actual torque with a force sensor and provides direct feedback to the robot. The polishing process is a bottleneck for semiconductor manufacturing equipment parts manufacturers due to monotonous work, high turnover rates, and variability in finishing quality depending on the operator. This system has automated the achievement of a uniform polishing surface, which cannot be realized through numerical control or current load. [Implementation Effects] ■ Resolution of bottlenecks ■ Uniform quality ■ Cost reduction ■ Improved employee retention rate ■ Repayment of equipment funds in a short period (approximately 1.5 years) *For more details, please download the PDF or feel free to contact us.

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