Small Metal Furnace | High Purity Heat Treatment to Reduce Contamination and Outgassing of Furnace Materials
Suppressing outgassing and dust generation from insulation materials and furnace materials in the metal hot zone.
The "metal furnace" is a small furnace designed for high-purity heat treatment, constructed with materials such as tungsten and molybdenum. In typical electric furnaces, outgassing, dust generation, and volatile components from insulation materials, furnace materials, and heater components can affect the surface condition and impurity concentration of the processed items. This equipment minimizes contamination from insulation materials and furnace material by using an all-metal construction inside the furnace, allowing for clean high-temperature processing under vacuum or inert gas atmospheres. It is particularly suitable for the pre-treatment, annealing, and surface treatment of materials that are sensitive to trace contamination from furnace materials, such as semiconductor materials, high-purity powders, oxide and nitride materials, and thin films and electrode materials. 【Features】 ■ Tungsten and molybdenum-based metal hot zone ■ Reduces outgassing and dust generation from insulation materials ■ Compatible with vacuum or inert gas atmospheres such as N2/Ar ■ Applicable for pre-treatment of high-purity powders and semiconductor materials ■ Compact design makes it easy to introduce for research and development and condition testing *For more details, please download the materials or contact us.
basic information
【Principle and Structure】 ■ Metal Hot Zone Configuration - Electrically heated through tungsten and molybdenum-based heaters - Stable heating of the furnace due to the high thermal conductivity of metals ■ Reduction of Contamination from Insulation Materials - Configuration that does not use common ceramic insulation materials in the furnace - Suppression of outgassing, dust generation, and volatile components from insulation materials ■ Clean Atmosphere Control - Compatible with inert gas atmospheres such as vacuum or N2/Ar - Reduces gas emissions from furnace materials, lowering the risk of contamination to processed items 【For Such Materials】 ■ High-purity oxide and nitride powders ■ Semiconductor materials, SiC substrates, functional ceramics ■ Thin films, electrode materials, sputtering target materials ■ Research and development samples where contamination from furnace materials is to be avoided *Specifications will be proposed according to application, temperature, and atmospheric conditions.
Price information
*The price may vary depending on the device specifications, so please feel free to contact us for more details.
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Applications/Examples of results
【Applicable Fields】 ■ Pre-treatment of semiconductor materials, SiC substrates, and oxide single crystals ■ Annealing of high-purity powders and oxide/nitride materials ■ Heat treatment of sputter target materials, thin films, and electrode materials ■ Material evaluation requiring high-precision temperature profiles ■ Sample heating and degassing treatment prior to surface analysis ■ Research and development applications where contamination from furnace materials is to be avoided 【For Such Challenges】 ■ Outgassing from insulation materials in general furnaces is a concern ■ Want to avoid trace contamination from dust and volatile components of furnace materials ■ Aim to minimize variations in surface condition, color tone, and physical properties after treatment ■ Desire to perform clean high-temperature treatment in vacuum or inert gas ■ Want to investigate conditions for high-purity materials on a small scale Even at the stage where materials, treatment temperatures, and atmospheric conditions are not yet determined, you can consult us according to your application.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.