Metal furnace <More compact high-purity annealing with reduced contamination>
Maximizing the properties of metal powders and thin film materials in a clean heating environment that utilizes a metallic atmosphere.
Our "metal furnace" can be safely installed even at the laboratory or analysis room level due to its compact and sealed structure. It is suitable for applications such as reduction treatment of catalyst carriers and conductive materials, high-purity heat treatment of sputtering target materials and sintered bodies, and fundamental research on oxidation, diffusion, and precipitation behavior at high temperatures. We also have test units available. Additionally, we can manufacture furnaces for mass production scales beyond the small models. 【Features】 - Uses metals (Mo/W/stainless steel, etc.) for the furnace material to suppress contamination from carbon sources. - Compatible with vacuum to reducing atmospheres (H₂/N₂/Ar), allowing for heat treatment in a high-purity environment. - High-precision temperature control (up to 1800°C) enables accurate reproduction of annealing conditions for thin films and fine particles. - Its compact and sealed structure allows for safe installation even at the laboratory or analysis room level. - Proven track record of scaling up to mass production machines (Thermonic ENG also has experience in manufacturing large metal furnaces). *For more details, please feel free to contact us.
basic information
【Regarding these issues】 ■ Impurity contamination from carbon furnace materials cannot be avoided during high-temperature annealing. ■ A low-oxygen, low-moisture, and low-carbon-source atmosphere is required for the heat treatment of high-purity materials. ■ High reproducibility in temperature control and atmosphere control is required even for the evaluation of small-scale samples. *For more details, please feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Removal of surface oxide films and crystallization annealing of high-purity metal powders (such as Ni, Cu, Mo, W, etc.) ■ Residual stress relaxation and crystallinity improvement of thin film materials (such as Ti, Mo, Al, Cu-based, etc.) ■ Reduction treatment of catalyst supports and conductive materials ■ High-purity heat treatment for sputtering target materials and sintered bodies ■ Fundamental research on oxidation, diffusion, and precipitation behavior at high temperatures *For more details, please feel free to contact us.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.