Multi-atmosphere furnace <Firing with toxic gas generation, safety × reproducibility>
We design the entire process from vacuum replacement to atmosphere control, heating, and exhaust gas detoxification (scrubber/catalytic oxidation/thermal oxidation) in a seamless manner.
We handle "multi-atmosphere furnaces" that address generated gases such as NH3 and CO. Designed for a seamless process from vacuum replacement → atmosphere control → heating → exhaust gas harmlessness (scrubber/catalytic oxidation/thermal oxidation). In addition to small units, we also have a track record of producing furnaces for mass production scales. [Reasons why our carbon furnace is effective for graphitization] ■ Addresses generated gases such as NH3 and CO: Designed with materials, piping temperature control, and instrumentation tailored to gas characteristics. ■ Built-in vacuum system: Allows for vacuum replacement before and after processing → designated gas replacement, reducing the risk of residual gas when the furnace is opened. ■ Rectangular design × stacked shelves: High flexibility in tray design, enabling rapid extraction of optimal conditions for scale-up through parallel DOE of multiple samples under the same conditions. *For more details, please feel free to contact us.
basic information
【Specifications】 ■ Maximum temperature: Up to 1700℃ ■ Atmosphere: Various gases such as inert gas, vacuum, air, ammonia, etc. ■ Insulation material: Alumina molded insulation ■ Required utilities: Electricity, cooling water, process gas *For more details, please feel free to contact us.
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Applications/Examples of results
【Regarding such issues】 ■ Increased emissions with scale-up - The amount of NH3 and CO generated, which was not a concern at small scales like tubular furnaces, has reached a level that cannot be ignored with multi-stage trays and increased batch sizes. ■ Differences in material and seal resistance have been revealed - The gas resistance/corrosion resistance of the heating chamber, crucible, and sealing materials is insufficient, raising concerns about lifespan and reproducibility. *For more details, please feel free to contact us.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.