Multi-atmosphere furnace <Firing with toxic gas generation, safety × reproducibility>
We design everything from vacuum replacement to atmosphere control, heating, and exhaust gas detoxification (scrubber/catalytic oxidation/thermal oxidation) in a seamless manner.
We handle "multi-atmosphere furnaces" designed to accommodate gases such as NH3 and CO. The design integrates vacuum replacement, atmosphere control, heating, and exhaust gas harmlessness (scrubber/catalytic oxidation/thermal oxidation) in a seamless process. Additionally, we have a proven track record of manufacturing furnaces at mass production scale, not just for small units. [Reasons why our carbon furnace is effective for graphitization] - Accommodates gases such as NH3 and CO: Designed with materials, piping temperature control, and instrumentation tailored to the characteristics of the gas types. - Built-in vacuum system: Allows for vacuum replacement before and after processing, enabling designated gas replacement and reducing the risk of residual gas when the furnace is opened. - Rectangular design with stacked shelves: High flexibility in tray design allows for parallel DOE of multiple samples under the same conditions, enabling rapid extraction of optimal conditions for scale-up. *For more detailed information, please download our materials or feel free to contact us.
basic information
【Specifications】 ■ Maximum Temperature: Up to 1700℃ ■ Atmosphere: Various gases such as inert gas, vacuum, air, ammonia, etc. ■ Insulation Material: Alumina molded insulation ■ Required Utilities: Electricity, cooling water, process gas *For more detailed information, please download the materials or feel free to contact us.
Price information
*The price may vary depending on the equipment specifications, so please feel free to contact us for more details.
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Applications/Examples of results
【Regarding such issues】 ■ Increased emissions with scale-up - The generation of NH3 and CO, which was not a concern at small scales like tubular furnaces, has reached a level that cannot be ignored with multi-stage trays and increased batch quantities. ■ Differences in material and seal resistance have been revealed - The gas resistance and corrosion resistance of the heating chamber, crucible, and sealing materials are insufficient, raising concerns about lifespan and reproducibility. *For more detailed information, please download the materials or feel free to contact us.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.