Metal furnace for semiconductor packaging
Achieving airtight sealing of ceramics and metals in a high-purity atmosphere.
In the semiconductor industry, the airtightness in the sealing process is crucial for product reliability and long-term performance maintenance. Particularly for semiconductor devices that are susceptible to temperature changes and external environmental influences, a strong bond between the sealing material and metal/ceramic materials is required. Inadequate sealing can lead to device failure or performance degradation. A metal furnace achieves strong sealing while controlling the thermal expansion differences between ceramics and metals by providing a high vacuum and clean atmosphere. This contributes to the improvement of semiconductor device reliability. 【Application Scenarios】 - High-purity annealing of thin films, electrodes, and optical components - Sealing of ceramics and metals 【Benefits of Implementation】 - Stabilization of wettability, interfacial strength, and airtightness in a low O2/H2O/HC environment - Prevention of contamination and carbonization in a carbon-free environment - Reduction of prototype to mass production cycles through rapid switching between vacuum and reducing atmospheres
basic information
【Features】 - Compatible with high vacuum (10^-5 Pa level) to reducing atmosphere operation - Maintains a clean atmosphere with a metal furnace structure (Mo/W) - Easy to combine with metal jigs and load pressurization mechanisms - Supports miniaturization of samples and localized heating tests 【Our Strengths】 We integrate three technologies: "electricity," "equipment," and "chemistry" to develop innovative heating furnaces. Looking ahead to the standards of the next decade, we are a strategic development partner that supports manufacturing with innovative heat in collaboration with our customers.
Price information
*Please feel free to contact us for more details, as prices may vary depending on the device specifications.
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Applications/Examples of results
【Application Examples】 ■ Sealing/brazing/diffusion bonding of ceramics and metals ■ High-purity annealing/sealing of thin films, electrodes, optical components, etc. *For more detailed information, please download the materials or feel free to contact us.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.