R-Series for Semiconductor Manufacturing
A reliable, oil-free gas sampling pump that maintains a cleanroom environment.
In the semiconductor manufacturing industry, stabilizing the manufacturing process and maintaining the environment within clean rooms are extremely important. Especially in the exhaust process, high reliability that can withstand continuous operation is required to prevent contamination. The risk of impurities entering or pump stoppages directly leads to reduced product yield and halts in the manufacturing line. Our R-Series Diaphragm Sampling Pump achieves stable exhaust and sampling in a clean environment through its oil-free design and robust structure. 【Usage Scenarios】 - Gas exhaust processes in clean rooms - Gas sampling from manufacturing equipment - Exhaust lines requiring continuous operation 【Benefits of Implementation】 - Reduced contamination risk due to oil-free design - Increased operational efficiency due to continuous operation capability - Reduced maintenance frequency due to high durability
basic information
【Features】 - Oil-free design enables clean sampling without contamination - Performance range of up to 150 LPM, 29.9 InHg, and 75 PSIG - Reliable design suitable for continuous operation - High durability reduces maintenance frequency - Double diaphragm structure protects the sample medium in case of damage 【Our Strengths】 As experts in embedded pumps, we have over 60 years of experience worldwide. As the Japanese subsidiary of Ingersoll Rand, we are highly regarded by many customers for our technology, quality, cost, and stable supply. We provide customized solutions tailored to customer specifications, from proposal to development and production, supported by our global manufacturing bases and support systems.
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Model number/Brand name
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Applications/Examples of results
Ideal for industries such as environmental sampling, gas analysis, chemical processing, oil refineries, gas chromatography, and automotive exhaust gas testing.
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Our company (Gardner Denver, Inc.) delivers Thomas products to our customers in Japan as the Japanese subsidiary of Ingersoll Rand's PST division's Life Sciences segment. Thomas is a global brand of air and liquid pumps for equipment integration, used in over 150 applications across medical, environmental, laboratory, general industry, and transportation sectors.