Substrate Surface Macro Inspection Device 'Stealth300V Series'
Comprehensive substrate inspection with high sensitivity and speed.
The "Stealth300V Series" is a device that captures the reflected/scattered light from the surface of substrates/membranes illuminated by an LED line using a super-sensitive camera, allowing for the analysis of their surface conditions. It enables high-speed inspection of overall trends in substrates that could not be detected by conventional localized (micro) inspections. It has a proven track record in inspecting film uniformity, exposure uniformity, and surface scratches in OLEDs and semiconductors. Additionally, by equipping a fine surface foreign matter inspection optical system option, it is also capable of detecting foreign matter equivalent to PSL 0.3um. 【Features】 ■ High-speed, comprehensive measurement ■ High-sensitivity imaging ■ Easy maintenance ■ Customizable inspection software to meet customer specifications
basic information
【Specifications】 ■Board size: 8 inch to 12 inch wafer, square board (consultation available for small diameter boards) ■Loading method: Manual/Automatic ■Options: GEM/GEM300 communication, KLARF file output Surface foreign matter inspection optical system option Backside scratch inspection optical system option *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
■Industry achievements: OLED, MicroLED, color filters for image sensors, mask blanks ■Inspection target substrates: Silicon, quartz, glass, LT/L... ■Inspection targets: Resist films, color resist films, PI films, etc... ■Detected defects: Non-uniformity, foreign matter, scratches, residues, defocus, cracks, etc... *For more details, please download the PDF or feel free to contact us.
