Nano probe for SEM-FIB, micro probe for optical microscope
The self-driving nano-probe robot 'miBot', which is different from conventional manipulators!
This innovative nano-probing system can control up to eight miBot nano-probers and can be offered with various configurations and options. Customization is possible to meet application-specific requirements and installation conditions for the equipment. The compact and lightweight platform for miBot can be adapted to various electron microscopes and can be mounted on sample stages such as SEM or introduced into the sample chamber via a load lock. It also supports high-resolution imaging using semi-in-lens objective lenses, enabling nano-probing tests under high-resolution imaging at low acceleration voltages below 0.5 kV using the new FE-SEM. Additionally, it is possible to tilt the entire nano-probing system using the tilt mechanism of the SEM sample stage. This allows for circuit modification with FIB and nano-probing to be performed in the same environment, resulting in faster and more accurate failure analysis results. *For more details, please refer to the PDF document or feel free to contact us.*
basic information
【Specifications】 ■ Nano Prober miBotNANO ■ Degrees of Freedom: 4 types of independent drive for each probe (X, Y, R, Z) ■ Dimensions and Weight ・Main Unit: 20.5×20.5×13.6mm³ ・Arm: 8.3mm (no mounting tools required) ・Weight: 12g ■ Maximum Positioning Resolution Motion Mode ・Coarse (stepping) and Fine (scanning) ・Stepping: 50nm (X, Y), 120nm (Z) ・Scanning: 1.5nm (X, Y), 3.5nm (Z) *For more details, please refer to the PDF document or feel free to contact us.
Price range
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
