東京炭素工業 Official site

Graphite heater for semiconductor film formation

Graphite heaters supporting the film deposition process in semiconductor manufacturing.

In the semiconductor industry's film deposition process, precise temperature management is essential for the formation of high-quality thin films. In particular, a uniform temperature distribution in high-temperature environments and high durability are required. Inadequate temperature management can lead to a decline in thin film quality and a decrease in yield. Our graphite processing case, the heater (element) for high-temperature furnaces and vacuum furnaces, addresses these challenges by converting electrical energy into heat and raising the temperature inside the furnace. 【Usage Scenarios】 - CVD (Chemical Vapor Deposition) - PVD (Physical Vapor Deposition) - ALD (Atomic Layer Deposition) 【Benefits of Implementation】 - High-quality film deposition due to uniform temperature distribution - Stable operation due to high durability - Optimal size and shape through custom-made solutions

Related Link - https://tokyotanso.com/product/

basic information

【Features】 - Excellent properties against heat - High conductivity - Lightweight and easy to process - Chemical resistance - Self-lubricating 【Our Strengths】 78 years of experience and know-how in carbon and graphite processing A diverse stock of materials Flexibility to accommodate from mass production to single units Support for hand-drawn designs

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Applications/Examples of results

For more details, please download the PDF or feel free to contact us.

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Distributors

Our company will celebrate its 77th anniversary in 2024. For a long time, even before the advent of high-performance machines such as machining centers and NC lathes, we have been a leading company in the industry specializing in the processing of carbon and graphite. - We always keep a diverse range of materials in stock, sourced from various material manufacturers. - Since we operate on a made-to-order basis, we can accept orders for both mass production and single pieces. - You can provide drawings in handwritten form, so please feel free to contact us even just for a quote.