PP filter for CMP slurry
CMP filter pre-wet patent obtained
The filter, which underwent pre-flushing at ultra-high pressure, demonstrates superior performance in terms of the number of particles per ml and metal contamination levels compared to non-flushing filters.
basic information
Propose an environmentally friendly solution to reduce the amount of waste liquid from chemical solutions in the manufacturing process and improve the reuse rate through circulation. This can also contribute to improving productivity and reducing costs.
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Applications/Examples of results
The filter, which underwent pre-flushing at ultra-high pressure, demonstrates superior performance in terms of the number of particles per ml and metal contamination levels compared to non-flushing filters.
