FOURP Road Port N2 Purge Modification
A kit has been developed to modify the current FOUP load port for N2 purge functionality within 8 hours. There have been 3,000 units delivered.
Three types of purge: 1. Purge during loading 2. Purge during opening 3. Purge during unloading
basic information
POINT: 1. Power: AC110V, 15A (One power socket is required for each port. The required capacity for the machine is 15A.) 2. Gas: XCDA tube: 3/8”, 6Kg/cm2 (In practice, it can be used up to 5Kg/cm2. 200L/min; one tube is drawn for each port.) 3. Exhaust: GEX, 3/8” (One 3/8 tube is drawn for each port.) 4. Communication: Ethernet (Only one network line needs to be drawn to the main machine to enable IP usage.) 5. Holes are required (For each L/P, it is necessary to drill holes in the circuit and pipeline front. Regardless of size, please confirm the position properly on site.)
Price range
Delivery Time
Model number/Brand name
FOUP Loadport N2 Purge
Applications/Examples of results
Over 3,000 units delivered.
