[Case Study] Preheating of Film Deposition Equipment
[Case Study] Preheating of Film Formation Equipment
This is a case study of a preheating system for a film deposition device using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using a halogen lamp heater that has non-contact and high-speed heating capabilities even in a vacuum environment, we can contribute to reducing the takt time in the film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.
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This is a case study of a preheating system for film deposition equipment using Ushio's light source for optical heating, which has a solid and abundant track record. By using a halogen lamp heater with non-contact and high-speed heating capabilities even in a vacuum environment, we can contribute to reducing tact time in film deposition processes for semiconductors, FPDs, and solar cells. ● For other functions and details, please contact us.
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Heating, hardening, cleaning, modification, surface treatment, adhesion, exposure, lighting, treatment, measurement, testing... When it comes to "light," leave it to Ushio. From light sources to units and light devices, we propose the optimal "light" tailored to your goals and applications with our unique light technology (we also offer joint experiments, joint research, and lending of demo and experimental equipment).