Dust behavior analysis software "DSMC-Neutrals"
"Dust behavior affecting contamination" analysis supported by the rarefied fluid analysis software 'DSMC-Neutrals'
Simulation Analysis of Dust Behavior Affecting Contamination Initially compatible with various simulations 【Features】 ■ By adopting unstructured meshes, it is possible to compute the exact shape of complex actual devices. ■ High parallel efficiency allows for quick computation results even for large-scale shapes. ■ Since a particle method is used, unlike fluid models, convergence solutions can be obtained even with poor quality computational grids. ■ With comprehensive technical support, even those new to simulations or busy with experiments can reliably achieve results. ◆ Compatible with various cases ◆ - Simulation of rarefied gas flow in a vacuum chamber - Simulation of thin film generation in semiconductor manufacturing - Simulation of thin film generation in semiconductor manufacturing such as Chemical Vapor Deposition (CVD), Organic Light Emitting Diodes (OLED), and Molecular Beam Epitaxy (MBE) ◆ Outputs various computational results ◆ - Calculation of chemical reactions - Calculation of chemical reactions from Arrhenius-type reaction data - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions - Multiple reaction equations can be set up on the GUI *We also conduct contract analysis, so please feel free to contact us.
basic information
**Features** - A simulation software for dilute fluid using the particle method, useful for experiments and equipment development involving vacuum chambers. - Capable of simulating film deposition that includes chemical reactions such as CVD. - Adopts unstructured meshes, allowing for calculations that directly reflect the actual shape of the equipment. - High parallel efficiency enables quick computation results even for large-scale shapes. - Unlike fluid models, the particle method ensures convergence to a solution even with poor-quality computational grids. - Comprehensive technical support allows beginners in simulation and those busy with experiments to reliably achieve results. - For other functions and details, please contact us.
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Model number/Brand name
DSMC-Neutrals
Applications/Examples of results
◆ Organic EL (OLED) Simulation * Uniformity of film deposition rate, optimization of shape, temperature dependence of organic material deposition distribution in organic EL simulation, etc. ◆ Molecular Beam Epitaxy (MBE) Simulation * Optimization of molecular beam cell shape, uniformity of deposition distribution, concentration distribution in molecular beam epitaxy simulation, etc. ◆ Showerhead-type CVD (Chemical Vapor Deposition) * Evaluation of film deposition rate * Evaluation of film uniformity * Distribution of radicals affecting film growth in the gas phase * Concentration distribution on the substrate surface * Evaluation of gas flow rate and flow volume entering the chamber from the showerhead section ◆ Vacuum Pump Exhaust Simulation * Temperature and cross-sectional area dependence of conductance, effects of gas accumulation and outgassing, etc. ◆ Behavior of Macroparticles (Dust) * Effects of macroparticles within the chamber, etc. ◆ Hypersonic Rarefied Flow * Density and temperature distribution around objects, effects of chemical reactions, etc. ◆ Shock Waves ◆ Benard Convection ◆ Behavior of Dust in the Chamber * Effects of dust on films that need to consider gravity.
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low-temperature plasma analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal plasma analysis [VizSpark] Analyzes heat generated by arc plasma and the resulting temperature rise. - Particle method plasma analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related equipment at low pressure. - 3D rarefied gas analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated simulation for materials development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated thermal fluid analysis for pumps and valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose thermal fluid analysis software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with thermal energy generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulation throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Free CAE software introduction seminar - Ongoing!
We offer free introductions to the details and use cases of our software products for those interested in our offerings. We will clearly present the introduction of the software, explanations of the analysis models, application examples, and demonstrations, incorporating our past achievements. If you would like to attend a free seminar, please apply through the link below: 【Application Form (Details Page)】. Regarding the schedule and time of the seminar, we will respond flexibly according to your preferences, so please feel free to contact us. 【Seminar Overview and Application Form】 https://ssl.form-mailer.jp/fms/635707ab516124
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