Vacuum Device Thin Fluid Analysis Software 'DSMC-Neutrals'
Analysis of gas flow under low pressure conditions; analysis software compatible with rarefied gases (rarefied fluids).
【Features】 ■ Adopts unstructured mesh, allowing for calculations that accurately reflect the complex shapes of actual devices. ■ High parallel efficiency enables quick computation results even for large-scale geometries. ■ Utilizes a particle method, ensuring convergence to a solution even with poor quality computational grids, unlike fluid models. ■ Comprehensive technical support ensures that even those new to simulation or busy with experiments can reliably achieve results. ◆ Supports various cases ◆ - Simulation of rarefied gas flow within a vacuum chamber. - Simulation of thin film generation in semiconductor manufacturing. - Simulation of thin film generation in semiconductor manufacturing processes such as Chemical Vapor Deposition (CVD), Organic Light Emitting Diodes (OLED), and Molecular Beam Epitaxy (MBE). ◆ Outputs various computation results ◆ - Calculation of chemical reactions. - Calculation of chemical reactions from Arrhenius-type reaction data. - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions. - Ability to set multiple reaction equations on the GUI. * For more details, please refer to the catalog or feel free to contact us.
basic information
**Features** - A simulation software for rarefied fluid using the particle method, useful for experiments and equipment development using vacuum chambers. - Capable of simulating film deposition that includes chemical reactions such as CVD. - Adopts unstructured meshes, allowing calculations that directly reflect the actual shape of the equipment. - High parallel efficiency enables quick computation results even for large-scale shapes. - Unlike fluid models, the particle method ensures convergence to a solution even with poor quality computational grids. - Comprehensive technical support allows beginners in simulation and those busy with experiments to reliably obtain results. - For other features and details, please refer to the catalog.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
DSMC-Neutrals
Applications/Examples of results
◆ Organic EL (OLED) Simulation * Uniformity of film deposition rate, optimization of shape, temperature dependence of organic material deposition distribution in organic EL simulation, etc. ◆ Molecular Beam Epitaxy (MBE) Simulation * Optimization of molecular beam cell shape, uniformity of deposition distribution, concentration distribution in molecular beam epitaxy simulation, etc. ◆ Showerhead-type CVD (Chemical Vapor Deposition) * Evaluation of deposition rate * Evaluation of film uniformity * Distribution of radicals affecting film growth in the gas phase * Concentration distribution on the substrate surface * Evaluation of gas flow rate and flow volume entering the chamber from the showerhead section ◆ Vacuum Pump Exhaust Simulation * Temperature and cross-sectional area dependence of conductance, effects of gas pockets and outgassing, etc. ◆ Behavior of Macroparticles (Dust) * Effects of macroparticles within the chamber, etc. ◆ Hypersonic Rarefied Flow * Density and temperature distribution around objects, effects of chemical reactions, etc. ◆ Shock Waves ◆ Benard Convection ◆ Behavior of dust within the chamber * Effects of dust on the film that need to consider gravity.
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News about this product（8）
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July 3 (Wed) - July 5 (Fri) [Exhibition Participation] Announcement of ISSP2024 Corporate Exhibition Corner Participation
The International Symposium on Sputtering and Plasma Processes 2024 (ISSP2024) will be held from July 3 (Wednesday) to July 5 (Friday), 2024, organized by the Surface Vacuum Society. Our company will be exhibiting at the corporate exhibition corner. ■ Exhibition Homepage https://www.issp-jvss.org/ ISSP is an international exhibition focused on sputtering and plasma process technology. This will be the first event in five years since ISSP2019 was held in 2019. Please be sure to stop by our exhibition corner. We will also be holding consultation sessions with our technical staff and demonstrating our developed software, such as Particle-PLUS and DSMC-Neutrals!! We sincerely look forward to your visit.
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low-temperature plasma analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal plasma analysis [VizSpark] Analyzes heat generated by arc plasma and the resulting temperature rise. - Particle method plasma analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related equipment at low pressure. - 3D rarefied gas analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated simulation for materials development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated thermal fluid analysis for pumps and valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose thermal fluid analysis software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
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Handling CAE Solutions
A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with thermal energy generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulation throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!
