[Case Study] CVD Analysis of 'DSMC-Neutrals' Showerhead Type

fig_02_details_of_the_shower-head_and_ar_gas_inlet_conditions.png

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fig_09_density[cbm]_in_(x-y)_plane_at_each_height_z.png

Dilute fluid analysis software 'DSMC-Neutrals' that also supports 'shower head type CVD' analysis.

Simulation Analysis of Gas Flow in Shower Head Type CVD Equipment Initially compatible with various simulations 【Features】 ■ By adopting a non-structured mesh, it is possible to calculate the complex shapes of actual equipment as they are. ■ High parallel efficiency allows for quick computation results even for large-scale shapes. ■ Since a particle method is used, unlike fluid models, convergence solutions can always be obtained even with poor quality computational grids. ■ With comprehensive technical support, even those new to simulations or busy with experiments can reliably achieve results. ◆ Compatible with various cases ◆ - Simulation of rarefied gas flow in a vacuum chamber - Simulation of thin film generation in semiconductor manufacturing - Simulation of thin film generation in semiconductor manufacturing such as Chemical Vapor Deposition (CVD), Organic Light Emitting Diodes (OLED), and Molecular Beam Epitaxy (MBE) ◆ Outputs various computation results ◆ - Calculation of chemical reactions - Calculation of chemical reactions from Arrhenius-type reaction data - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions - Multiple reaction equations can be set on the GUI *We also offer contract analysis, so please feel free to contact us.

basic information

**Features** - A simulation software for dilute fluid using the particle method, useful for experiments and equipment development using vacuum chambers. - Capable of simulating film formation that includes chemical reactions such as CVD. - Adopts unstructured meshes, allowing for calculations that directly reflect the actual shape of the equipment. - High parallel efficiency enables quick computation results even for large-scale shapes. - Unlike fluid models, the particle method guarantees convergence to a solution even with poor quality computational grids. - Comprehensive technical support ensures that even those new to simulation or busy with experiments can reliably achieve results. - For other functions and details, please contact us.

Price range

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Delivery Time

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Model number/Brand name

DSMC-Neutrals

Applications/Examples of results

◆ Organic EL (OLED) Simulation * Uniformity of film deposition rate, optimization of shape, temperature dependence of organic material deposition distribution in organic EL simulation. ◆ Molecular Beam Epitaxy (MBE) Simulation * Optimization of molecular beam cell shape, uniformity of deposition distribution, and concentration distribution in molecular beam epitaxy simulation. ◆ Showerhead-type CVD (Chemical Vapor Deposition) * Evaluation of deposition rate * Evaluation of film uniformity * Distribution of radicals affecting film growth in the gas phase * Concentration distribution on the substrate surface * Evaluation of gas flow rate and flow volume entering the chamber from the showerhead section ◆ Vacuum Pump Exhaust Simulation * Temperature and cross-sectional area dependence of conductance, effects of gas accumulation and outgassing, etc. ◆ Behavior of Macroparticles (Dust) * Effects of macroparticles within the chamber, etc. ◆ Hypersonic Rarefied Flow * Density and temperature distribution around objects, effects of chemical reactions, etc. ◆ Shock Waves ◆ Benard Convection ◆ Behavior of dust in the chamber * Effects of dust on films that need to consider gravity.