[Example] Exhaust simulation of DSMC-Neutrals vacuum device
Various information about vacuum exhaust can be derived through simulation!
Our self-developed software for three-dimensional rarefied gas analysis, 'DSMC-Neutrals', enables vacuum system exhaust simulation. By visualizing the calculation results of various physical quantities and plotting transient graphs, it allows for easy visualization of various information that is difficult to obtain through experiments alone in the design and development of exhaust systems. For more details, please visit the URL below.
basic information
【Calculable Examples (Excerpt)】 ■ Showerhead-type thermal CVD (Chemical Vapor Deposition) ■ Vacuum deposition ■ Molecular Beam Epitaxy (MBE) ■ Exhaust of vacuum pumps ■ Dust behavior simulation ■ Hypersonic rarefied flow 【Features】 ■ Simulation software for rarefied fluid using particle methods ■ Usable for experiments and equipment development using vacuum chambers ■ Capable of simulating film deposition rates and distributions that include chemical reactions like CVD ■ Adopts unstructured meshes, allowing for calculations based on the actual shape of the equipment ■ High parallel efficiency enables quick computation results even for large shapes ■ Since it uses particle methods, unlike fluid models, it can achieve convergent solutions even with poor quality computational grids *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
