Defect Detection for Semiconductors using Cheetah EVO
Support for program operation, automation of semiconductor inspection, and stabilization of quality.
In the semiconductor industry, detecting minute defects in the manufacturing process is essential to ensure product quality and reliability. Especially as devices become smaller and more densely packed, tiny defects that are difficult to detect through visual inspection can significantly impact product performance. The Cheetah EVO provides high-precision X-ray inspection technology to address these challenges. 【 Application Scenarios 】 ● Internal defect inspection of semiconductor chips ● Defect analysis of packaging ● Inspection of bonding failures in mounted substrates 【 Benefits of Implementation 】 ● Improved yield through early detection of defects ● Labor reduction through automation of the inspection process ● Stable supply of high-quality products
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【 Features 】 ● Multi-focus X-ray tube compatible with nano focus, micro focus, and high power modes ● High-resolution X-ray detector with 16-bit 65,536 gradations ● Three-dimensional failure analysis using orthogonal CT and oblique CT ● Highly reproducible inspections through programmed operation functions ● Solutions for X-ray exposure protection 【 Our Strengths 】 Comet Yxlon supports customers in solving their challenges with many years of experience and technical expertise as a manufacturer of X-ray non-destructive testing equipment. In our Yokohama application lab, sample evaluations and witness tests are also possible.
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Model number/Brand name
Comet Yxlon
Applications/Examples of results
Semiconductors, electronic components, electronic modules, mounting substrates, etc.
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Inspecting the Future. Comet Yxlon carries on the legacy of the industrial X-ray business originally developed by Philips, through the X-ray division of Yxlon International, founded in 1998. Headquartered in Hamburg, Germany, Comet Yxlon specializes in the development and manufacturing of X-ray inspection systems, serving customers worldwide. In 2007, the company became part of the Swiss technology group Comet, and in 2022, rebranded from YXLON to Comet Yxlon. Comet Yxlon provides industrial X-ray CT inspection systems and related services for non-destructive testing (NDT) and failure analysis. Our product lineup ranges from high-resolution nano-focus inspection systems to high-power, large-scale CT systems, enabling us to deliver customized solutions that meet a wide range of customer needs. Our systems are widely used across industries such as automotive, semiconductors and electronics, aerospace, and defense. We support our customers with innovative products and services that empower them to shape the markets of the future.