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Film Thickness Measurement System SKOP

An inexpensive and simple film thickness measurement system using Ocean Optics spectrometers!

The SKOP (Starter Kit for Optical thickness measurement) optical film thickness measurement system measures the spectral reflectance of optical thin films and determines their thickness by analyzing the spectrum. The thin film on the substrate acts as an etalon, causing an interference pattern in the reflection spectrum. The spacing between the peaks of the sinusoidal pattern correlates with the refractive index of the material and the thickness of the film. In SKOP, the interference pattern is analyzed using dedicated software to convert it into the film thickness.

Related Link - https://www.optosirius.co.jp/SKOP/

basic information

Measurable film thickness range (converted to nd): 1.5 - 70.0 μm (please consult us for other film thicknesses) Actual measurement repeatability (standard deviation): SiO2: 0.001 (@ thickness 1.6 μm) Air: 0.007 (@ thickness 10 μm), 0.01 (@ thickness 30 μm) Si: 0.0003 (@ thickness 1.5 μm), 0.004 (@ thickness 9 μm) Measurement spot diameter: 3.6 mm For detailed specifications, please contact our representative.

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Applications/Examples of results

Si, SiO2, SiN, SiC, LN, coating film on glass/lens, coating film on film

Film Thickness Measurement System SKOP

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