Vacuum Pressure Sensor | Pirani Type Vacuum Pressure Sensor for High Vacuum Measurement
This is a vacuum pressure sensor that can be cleaned with low voltage operation. It is suitable for high vacuum measurement applications in semiconductor manufacturing equipment.
The MEMS Pirani vacuum sensor "PVC1000 series" achieves miniaturization of vacuum measurement methods while realizing ultra-low power consumption, long lifespan, minimal maintenance, and low cost. Measurement range: 10^-3 to 30 mmHg with high precision of ±5% in the range below 5 mmHg Humidity: 0~100% (non-condensing) Temperature compensation range: -40 to 125℃ Durability pressure: 27.5Bar
basic information
Features - Ultra-low power consumption < 5mW - High response speed < 5ms - Gas volume of approximately 0.1㎤ - Low noise - High resolution - On-chip temperature detection - Long-term stability - Washable
Price range
Delivery Time
Model number/Brand name
Pirani-type vacuum sensor "PVC1000 Series"
Applications/Examples of results
For high vacuum measurement applications in semiconductor manufacturing equipment.
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All Devices Co., Ltd. (formerly All Sensors Asia Pacific Co., Ltd.) was established on July 1, 2015. Our sensors, utilizing unique sensing technology, achieve high precision and stability, particularly in low-pressure and micro-pressure applications. We have gained support from companies that require accurate measurement of small pressures in fields such as medical, industrial, and IoT. Requests from our customers have expanded beyond differential pressure, leading to numerous inquiries and orders. We are now able to assist not only with fluid measurements such as pressure, flow rate, and wind speed but also with various sensors for temperature, oxygen, and even consulting services. In light of this progression, we have changed our company name to All Devices Co., Ltd. to reflect our capability to respond to any inquiries. Although we have changed our name, we will continue to provide support as the official representative office of All Sensors in the Asia Pacific region, just as we have in the past. We are committed to enhancing our expertise and international perspective to meet the expectations of even more customers. All Devices Co., Ltd. President and CEO, Tetsuo Hata