Oil Cooling for Semiconductor Manufacturing Equipment - Oil Chiller VSC Series
The VSC series oil chillers, which adopt non-Freon refrigerants, are exempt from the Freon Emission Control Law and can manage water temperatures with high precision of ±0.1°C.
【Oil Cooling for Semiconductor Manufacturing Equipment】 Oil Chiller VSC Series The oil chiller is a device that cools oil, used for cooling the main spindle of machine tools and for cooling the hydraulic fluid of associated hydraulic units. Issues such as processing errors caused by heat, oil leaks, and equipment shutdowns due to high oil temperatures can be resolved by adopting an oil chiller that maintains the oil temperature at a constant level. ーーーーーーーーーーーーーーーーーーーーーーーーーーーーーー The 'VSC Series' oil chiller, the industry's first to adopt the new refrigerant R1234yf. With a global warming potential of less than 1 and an ozone depletion potential of 0, it is an environmentally friendly refrigerant compared to freon, and it is, of course, exempt from the Freon Emission Control Law. Since the conventional oil chiller required a simple inspection every three months, this new oil chiller significantly reduces management workload and also lowers costs associated with freon recovery and destruction during equipment disposal. 【Features of the Oil Chiller】 ■ Subject to Freon Emission Control Law ■ High-precision oil temperature management of ±0.1℃
basic information
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Applications/Examples of results
【Case Studies】 ■ Main spindle cooling of machining centers ■ Cooling of hydraulic oil in broaching machines ■ Cooling of hydraulic operating oil in 6-axis milling machines ■ Cooling of hydraulic operating oil in presses
