Precision Air Conditioning Unit PAU Series for Semiconductors
Temperature management for semiconductor manufacturing. Improved quality with high-precision air conditioning.
In the semiconductor industry, temperature management in the manufacturing process is a crucial factor that affects product quality. Particularly in fine processing and advanced manufacturing technologies, even slight fluctuations in temperature can significantly impact yield and performance. Precise temperature management is essential to ensure product reliability and to suppress the occurrence of defects. Apiste's precision air conditioning unit, the PAU series, achieves ultra-high precision control with temperature ±0.1℃ and humidity ±0.5% RH, meeting the stringent temperature and humidity management needs in semiconductor manufacturing. Compared to large air conditioning units, it can be implemented in a short time and at a low cost. 【Usage Scenarios】 - Clean rooms - Inspection rooms - Manufacturing lines - Research and development facilities 【Benefits of Implementation】 - Improved yield through stabilization of temperature and humidity - Stabilization of product quality - Optimization of manufacturing processes - Energy savings
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【Features】 - Temperature control ±0.1℃ - Humidity control ±0.5% RH - Cleanliness control Class 10 to Class 10000 - Flexible response to changes in manufacturing line specifications and layouts 【Our Strengths】 Under the philosophy of "wanting to provide the best technology, products, and sincerity," we develop and sell environmental improvement equipment, cooling equipment, and temperature control equipment.
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Apiste PAU Series
Applications/Examples of results
【Case Studies】 ■ Clean Room, Constant Temperature Room ■ Exposure Equipment ■ Optical Table ■ Mold Press ■ Prober ■ Precision Processing Machine ■ Printing Machine ■ Charge and Discharge Device ■ Various Analysis and Testing Equipment
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"Apice," which means "peak" in Spanish. That peak represents "technology" = robust development capabilities, "product" = unmatched high quality, "sincerity" = human service. This spirit, depicted in the clear blue sky, has taken shape in reality, becoming distinctly outlined. And, looking further ahead. What lies in our vision is already the blue sky of the future. Aiming for a new peak.