TOC Analyzer Sievers M9e for the Semiconductor/Electronics Industry
Continuous monitoring of ultra-low concentration TOC in ultrapure water for the semiconductor and electronics industries! Rapid measurement across a wide range!
The Sievers M9e can accommodate a variety of applications thanks to its unique gas-permeable membrane conductivity measurement method and wide measurement range (0.03 ppb to 50 ppm). The optional turbo mode (analysis time of 4 seconds) is useful for monitoring recovery water. Features of the Sievers M9e: - Matching of measurement deviations - Stability in ultra-low concentration ranges - Automatic operation (calibration / verification / data analysis, etc.) - 12 months of calibration stability - Three models to choose from based on application (laboratory type / portable type / online type) - Sample conductivity measurement function (optional) allows simultaneous measurement of TOC and conductivity - Auto-sampler (optional) can automatically analyze up to 63 samples (40mL each).
basic information
- Common Specifications (Normal Mode & Turbo Mode) Measurement Principle: Wet UV Oxidation + Gas Permeable Membrane Conductivity Measurement Method Sample Water Flow Rate: 50 mL/min or more Sample Temperature: 5–95°C Sample Water Pressure: Up to 100 psig Interfering Substances: Not affected by coexisting ions other than organic substances Calibration Stability: Stable for normally 12 months Display Digits: 3 digits - Normal Mode Measurement Range: 0.03 ppb to 50 ppm TOC Accuracy: ± 2% or ±0.5 ppb, whichever is greater Reproducibility: RSD less than 1% Measurement Time: 2 minutes Flow Rate Inside Analyzer: 0.5 mL/min - Turbo Mode Measurement Range: 0.2 ppb to 10 ppm TOC Accuracy: Within ± 3% Reproducibility: RSD less than 2% Measurement Time: 4 seconds Flow Rate Inside Analyzer: 1.1 mL/min
Price range
Delivery Time
Model number/Brand name
Sievers M9e
Applications/Examples of results
Ultra-pure water production equipment for the semiconductor industry: raw water/RO water/recovery water Equipment cleaning evaluation Inorganic acid purity management Plating solution contamination evaluation Water treatment membrane performance evaluation Cooling water/boiler water leak detection
Detailed information
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Line up（3）
| Model number | overview |
|---|---|
| SPRD77130-01 | TOC Meter M9e Laboratory Type |
| SPRD77230-01 | TOC Meter M9e Portable Type |
| SPRD77330-01 | TOC Meter M9e Online Type |
