Full panel mass production projection exposure equipment 'CMS-Ck' ★ Demo now available!

Improves resolution and alignment accuracy, compatible with mass production processes. Adopts UV-LED light sources to reduce running costs.

The "CMS (Cerma Micro Stepper) - Ck" is a projection exposure device capable of fine pattern exposure, compatible with full-size substrates of 650×550mm. It uses a UV-LED light source as the standard light source. It is suitable for applications that require high precision, high resolution (L/S) of 2μm, and high productivity, starting with interposers. 【Features】 ■ Supports mass production processes from L/S = 1.4/1.4μm ■ Die-by-die alignment & global alignment methods ■ Capable of chip-first processes ■ Equipped with a tilt mechanism for each shot to improve yield *For more details, please refer to the documentation. Additionally, we have a clean room where our products can be evaluated. If you would like a demo, please feel free to contact us. (We can accommodate surrounding processes including lamination, coating, and development.)

To the HP of the projection exposure device (equipped with LED light source)

basic information

Applications: Semiconductor backend processes, RF filters, power semiconductors, electronic components, packaging, research, MEMS Supported substrates: Wafers (including special wafers) of various sizes, glass, organic substrates, etc. Our company also offers custom design, lens design, manufacturing, sales, and sales of LED light sources. For more details, please feel free to contact us.